北京中科科仪光学实验室净化工程 Beijing Zhongke Kexi Optical Laboratory Purification Project!

北京中科科仪光学实验室净化工程百级 / 千级精密实验区（电镜调试 / 光学检测），洁净度：ISO5（百级），≥0.5μm 微粒≤3520 个 /m³，温湿度：22℃±1℃，湿度 40%–50% RH，高精度恒温恒湿，压差：洁净区对非洁净区≥+10Pa，相邻洁净区≥+5Pa，防微振：VC‑G 级（满足电镜 0.1μm 级成像），混凝土减震台 + 主动减震器预留，电磁屏蔽：低频磁屏蔽墙体 + 彩钢板，抑制交流磁场干扰，噪音：≤50dB(A)；装修面积4714㎡；整个洁净系统均有北京奥云峰机电工程有限公司施工

The cleanroom project of the Beijing Zhongke Keyi Optical Laboratory, which includes the 100-level / 1000-level precision experimental area (for electron microscope debugging / optical testing), has a cleanliness level of ISO5 (100-level). The number of particles larger than 0.5μm is less than 3520 per cubic meter. The temperature and humidity are 22℃ ± 1℃, with a humidity range of 40% – 50% RH. It features high-precision temperature and humidity control, with a pressure difference of ≥ +10Pa between the clean area and the non-clean area, and ≥ +5Pa between adjacent clean areas. It also features vibration prevention: VC-G level (meeting the 0.1μm imaging requirement for electron microscopes), with a concrete vibration reduction platform and active vibration dampers reserved. Electromagnetic shielding: low-frequency magnetic shielding walls + color steel plates, to suppress AC magnetic field interference. Noise is ≤ 50dB(A). The total construction area is 4714 square meters. The entire clean system is constructed by Beijing Aoyunfeng Mechanical and Electrical Engineering Co., Ltd.